Parts For Sale TEGAL 46-997-001 TEGAL 46-997-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-997-001 Manufacturer TEGAL Part Number 46-997-001 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 38-023-001 COOLING RING 47-155-001 40-374-006 40-395-001 RING, FLAT 6 46-787-002 47-639-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 47-080-003 99-249-002 PCB TEGAL END POINT DETECTOR 47-733-001 37-221-001 UPPER ELECT, .014 HOLE NO RAD.