Parts For Sale TEGAL 46-994-002 TEGAL 46-994-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-994-002 Manufacturer TEGAL Part Number 46-994-002 Description Status Available Approx. Qty 7 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 7.0 US Other TEGAL Parts 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 31-406-003 WAFER SENSOR ASSY-VCE 80-195-450 51-056-001 42-826-005 47-006-002 39-741-026 Tegal 903e lower electrode 47-161-001 99-249-002 PCB TEGAL END POINT DETECTOR 37-175-001A 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02