Parts For Sale TEGAL 46-974-001 TEGAL 46-974-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-974-001 Manufacturer TEGAL Part Number 46-974-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 40-395-002 Ring Ceramic 125C Castellated 58-053-001 40-395-001 RING, FLAT 6 80-195-450 51-056-001 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E CR1008-00408EX CR1008-00408EX 39-761-001 00-0917-2 5" GUIDE RING #G00-0917-2 80-200-342 BAND CONT,FEM .125PIN .320L,BC 80-200-342 A4T1 PAD ETCHE ... 51-178-001 150 mm 150 mm 25 slot Aluminum wafer carrier.