Parts For Sale TEGAL 46-951-001 TEGAL 46-951-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-951-001 Manufacturer TEGAL Part Number 46-951-001 Description Status Available Approx. Qty 17 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 17.0 US Other TEGAL Parts 37-181-001 46-1006-001 74-101-001 47-583-001 39-956-001 47-695-001 40-576-003-C Ring Ceramic Focus Castellated 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 50-056-001 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 150 mm 150 mm 25 slot Aluminum wafer carrier.