Parts For Sale TEGAL 46-938-001 TEGAL 46-938-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-938-001 Manufacturer TEGAL Part Number 46-938-001 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 80-195-450 51-056-001 42-826-005 47-006-002 47-161-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 37-175-001A 40-576-003-C Ring Ceramic Focus Castellated 150 mm 150 mm 25 slot Aluminum wafer carrier.
