Parts For Sale TEGAL 46-897-001 TEGAL 46-897-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-897-001 Manufacturer TEGAL Part Number 46-897-001 Description Status Available Approx. Qty 61 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 61.0 US Other TEGAL Parts 37-181-001 74-101-001 47-583-001 39-956-001 47-695-001 39-733-004 Tegal 903e lower electrode 99-249-002 PCB TEGAL END POINT DETECTOR 50-056-001 80-200-121 BEARING DOOR T915 TEGAL CORPORATION 150 mm 150 mm 25 slot Aluminum wafer carrier.