Parts For Sale TEGAL 46-682-006 TEGAL 46-682-006 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-682-006 Manufacturer TEGAL Part Number 46-682-006 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 47-158-002 31-406-003 WAFER SENSOR ASSY-VCE 46-1006-001 39-741-026 Tegal 903e lower electrode 47-339-005 52-050-001 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 46-925-001 52-041-001 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02 47-445-001