Parts For Sale TEGAL 46-670-004 TEGAL 46-670-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-670-004 Manufacturer TEGAL Part Number 46-670-004 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 99-247-003 SPATULA INTERFACE 39-680-003 ELECTRODE, CONEHEAD VENTED 40-467-001 47-339-005 47-101-002 39-894-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 52-171-001 52-047-002 37-221-001 UPPER ELECT, .014 HOLE NO RAD.