Parts For Sale TEGAL 46-669-003 TEGAL 46-669-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-669-003 Manufacturer TEGAL Part Number 46-669-003 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 39-637-001 40-395-002 Ring Ceramic 125C Castellated 31-406-003 WAFER SENSOR ASSY-VCE 51-267-001 46-884-001 50-066-002 74-101-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 40-295-003 FOCUS RING 47-217-002 40-304-001 ELECTRODE, INSULATOR LOWER