Parts For Sale TEGAL 46-578-004 TEGAL 46-578-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-578-004 Manufacturer TEGAL Part Number 46-578-004 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 51-251-001 51-092-001 74-124-005 38-023-001 COOLING RING 39-741-026 Tegal 903e lower electrode 39-733-004 Tegal 903e lower electrode 47-261-002 46-681-003 52-175-001 150 mm 150 mm 25 slot Aluminum wafer carrier.
