Parts For Sale TEGAL 46-578-001 TEGAL 46-578-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-578-001 Manufacturer TEGAL Part Number 46-578-001 Description Status Available Approx. Qty 10 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 10.0 US Other TEGAL Parts 150 mm 150 mm 25 slot Aluminum wafer carrier. 47-634-001 40-768-006 Insulator Ring 44-432-002 46-776-003 38-023-001 COOLING RING 46-1006-001 37-411-001 51-228-001 58-043-004 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD.
