Parts For Sale TEGAL 46-513-001 TEGAL 46-513-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-513-001 Manufacturer TEGAL Part Number 46-513-001 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 47-155-001 40-374-006 46-787-002 46-912-002 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 47-639-001 47-080-003 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 39-818-001 SLEEVE,FIBER OPTIC #39-818-001 A4T1 PAD ETCHER TEGAL 903E 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02 150 mm 150 mm 25 slot Aluminum wafer carrier.