Parts For Sale TEGAL 46-480-005 TEGAL 46-480-005 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-480-005 Manufacturer TEGAL Part Number 46-480-005 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 37-181-001 46-879-001 40-768-006 Insulator Ring 38-023-001 COOLING RING 40-140-001 RING, CERAMIC INSULATOR 47-583-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 99-287-003 SHUTTLE INTERFACE BOARD 39-956-001 47-695-001 50-056-001
