Parts For Sale TEGAL 46-278-002 TEGAL 46-278-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-278-002 Manufacturer TEGAL Part Number 46-278-002 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 150 mm 150 mm 25 slot Aluminum wafer carrier. 58-073-001 37-221-002 UPPER ELECT ANOD, NON ANODIZED 46-879-001 40-395-001 RING, FLAT 6 74-101-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 39-894-001 39-956-001 46-278-004 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE
