Parts For Sale TEGAL 46-1082-001 TEGAL 46-1082-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-1082-001 Manufacturer TEGAL Part Number 46-1082-001 Description Status Available Approx. Qty 7 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 7.0 US Other TEGAL Parts 44-432-002 46-776-003 40-395-001 RING, FLAT 6 37-411-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 51-228-001 58-043-004 40-295-003 FOCUS RING 39-741-009 Tegal 903e lower electrode 46-272-003 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE