Parts For Sale TEGAL 46-1023-001 TEGAL 46-1023-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-1023-001 Manufacturer TEGAL Part Number 46-1023-001 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 150 mm 150 mm 25 slot Aluminum wafer carrier. 58-073-001 40-768-004 Insulator Ring 46-879-001 83-259-001 74-101-001 39-894-001 39-956-001 93-123-006 BELT 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 46-278-004