Parts For Sale TEGAL 46-1015-003 TEGAL 46-1015-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-1015-003 Manufacturer TEGAL Part Number 46-1015-003 Description Status Available Approx. Qty 7 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 7.0 US Other TEGAL Parts 38-023-001 COOLING RING 40-467-001 47-339-005 47-101-002 39-894-001 80-200-342 BAND CONT,FEM .125PIN .320L,BC 80-200-342 A4T1 PAD ETCHE ... 52-171-001 52-047-002 150 mm 150 mm 25 slot Aluminum wafer carrier.