Parts For Sale TEGAL 44-666-002 TEGAL 44-666-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 44-666-002 Manufacturer TEGAL Part Number 44-666-002 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 46-994-002 46-113-001 44-981-001 49-027-001 46-990-001 80-202-297 BELT 1/4W 115GRV 80-202-297 A4T1 PAD ETCHER TEGAL 903E 40-304-001 ELECTRODE, INSULATOR LOWER 80-202-357 O-Ring 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 39-665-001