Parts For Sale TEGAL 42-972-002 TEGAL 42-972-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-972-002 Manufacturer TEGAL Part Number 42-972-002 Description Status Available Approx. Qty 13 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 13.0 US Other TEGAL Parts 46-879-001 39-680-003 ELECTRODE, CONEHEAD VENTED 38-023-001 COOLING RING 74-101-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 44-888-001 39-956-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 46-278-004 44-957-001 40-576-003-C Ring Ceramic Focus Castellated 39-735-004 Tegal 903e lower electrode