Parts For Sale TEGAL 42-972-002 TEGAL 42-972-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-972-002 Manufacturer TEGAL Part Number 42-972-002 Description Status Available Approx. Qty 13 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 13.0 US Other TEGAL Parts 38-023-001 COOLING RING 39-756-003 40-467-001 47-339-005 47-101-002 39-894-001 52-171-001 99-249-002 PCB TEGAL END POINT DETECTOR 52-047-002 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD.