Parts For Sale TEGAL 42-889-004 TEGAL 42-889-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-889-004 Manufacturer TEGAL Part Number 42-889-004 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 40-768-004 Insulator Ring 31-406-003 WAFER SENSOR ASSY-VCE 47-155-001 40-374-006 46-787-002 46-912-002 47-639-001 47-080-003 37-222-002 Cooling Plate 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02