Parts For Sale TEGAL 42-766-001 TEGAL 42-766-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-766-001 Manufacturer TEGAL Part Number 42-766-001 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 46-879-001 40-395-002 Ring Ceramic 125C Castellated 74-101-001 44-888-001 39-956-001 42-960-003 39-741-009 Tegal 903e lower electrode 44-957-001 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02 150 mm 150 mm 25 slot Aluminum wafer carrier.