Parts For Sale TEGAL 42-665-001 TEGAL 42-665-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-665-001 Manufacturer TEGAL Part Number 42-665-001 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 46-879-001 40-481-002 Insulator Ring 39-756-003 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 44-888-001 42-683-001 99-287-003 SHUTTLE INTERFACE BOARD 39-956-001 42-960-003 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 44-957-001 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE