Parts For Sale TEGAL 42-665-001 TEGAL 42-665-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-665-001 Manufacturer TEGAL Part Number 42-665-001 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 39-741-004 ELECTRODE, LOWER 6" 47-158-002 43-014-001 44-261-002 44-960-001 39-741-009 Tegal 903e lower electrode 52-041-001 150 mm 150 mm 25 slot Aluminum wafer carrier. 47-445-001