Parts For Sale TEGAL 42-663-006 TEGAL 42-663-006 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-663-006 Manufacturer TEGAL Part Number 42-663-006 Description Status Available Approx. Qty 34 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 34.0 US Other TEGAL Parts 46-879-001 44-888-001 42-683-001 99-287-003 SHUTTLE INTERFACE BOARD 39-956-001 42-960-003 44-957-001 40-790-001 FOCUS RING 40-576-003-C Ring Ceramic Focus Castellated 150 mm 150 mm 25 slot Aluminum wafer carrier.
