Parts For Sale TEGAL 42-663-003 TEGAL 42-663-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-663-003 Manufacturer TEGAL Part Number 42-663-003 Description Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 6.0 US Other TEGAL Parts 39-741-004 ELECTRODE, LOWER 6" 80-650-053 ACTUATOR 47-339-005 52-050-001 42-852-001 44-960-001 39-741-009 Tegal 903e lower electrode 52-041-001 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL 47-445-001