Parts For Sale TEGAL 42-513-002 TEGAL 42-513-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-513-002 Manufacturer TEGAL Part Number 42-513-002 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 39-680-003 ELECTRODE, CONEHEAD VENTED 47-155-001 46-787-002 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 49-027-001 46-887-002 39-761-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 47-080-003 52-059-001 80-200-121 BEARING DOOR T915 TEGAL CORPORATION