Parts For Sale TEGAL 42-322-001 TEGAL 42-322-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-322-001 Manufacturer TEGAL Part Number 42-322-001 Description Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 6.0 US Other TEGAL Parts 161-0040K VALVE, INLINE VACUUM 51-251-001 51-092-001 74-124-005 39-756-003 42-326-002 42-960-003 40-295-003 FOCUS RING 46-556-002