Parts For Sale TEGAL 42-322-001 TEGAL 42-322-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-322-001 Manufacturer TEGAL Part Number 42-322-001 Description Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 6.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 39-680-003 ELECTRODE, CONEHEAD VENTED 42-508-001 43-014-001 44-261-002 40-295-003 FOCUS RING 44-960-001 52-041-001 40-576-003-C Ring Ceramic Focus Castellated 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL 47-445-001