Parts For Sale TEGAL 42-271-005 TEGAL 42-271-005 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-271-005 Manufacturer TEGAL Part Number 42-271-005 Description Status Available Approx. Qty 34 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 34.0 US Other TEGAL Parts 46-879-001 42-667-001 44-757-001 47-583-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 40-295-003 FOCUS RING 47-695-001 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 50-056-001 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02