Parts For Sale TEGAL 42-271-002 TEGAL 42-271-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-271-002 Manufacturer TEGAL Part Number 42-271-002 Description Status Available Approx. Qty 7 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 7.0 US Other TEGAL Parts 58-073-001 33-349-004 ELECTRODE, CONDEHEAD UPPER 39-680-003 ELECTRODE, CONEHEAD VENTED 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 40-467-001 42-362-001 47-101-002 39-894-001 52-047-002 40-140-003 RING, INSULATOR, CERAMIC .20-99.5% 150 mm 150 mm 25 slot Aluminum wafer carrier.