Parts For Sale TEGAL 42-183-001 TEGAL 42-183-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-183-001 Manufacturer TEGAL Part Number 42-183-001 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 47-158-002 40-481-002 Insulator Ring 46-1006-001 42-508-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 39-741-026 Tegal 903e lower electrode 43-014-001 44-261-002 46-925-001 44-960-001 150 mm 150 mm 25 slot Aluminum wafer carrier.