Parts For Sale TEGAL 42-169-001 TEGAL 42-169-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-169-001 Manufacturer TEGAL Part Number 42-169-001 Description Status Available Approx. Qty 14 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 14.0 US Other TEGAL Parts 46-879-001 31-406-003 WAFER SENSOR ASSY-VCE 44-888-001 42-683-001 39-956-001 42-960-003 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 44-957-001 80-200-121 BEARING DOOR T915 TEGAL CORPORATION