Parts For Sale TEGAL 42-168-001 TEGAL 42-168-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-168-001 Manufacturer TEGAL Part Number 42-168-001 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 39-853-005 40-395-002 Ring Ceramic 125C Castellated 47-155-001 40-374-006 46-787-002 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 46-912-002 47-639-001 47-080-003 39-733-004 Tegal 903e lower electrode 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%