Parts For Sale TEGAL 42-1026-001 TEGAL 42-1026-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-1026-001 Manufacturer TEGAL Part Number 42-1026-001 Description Status Available Approx. Qty 11 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 11.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 39-680-003 ELECTRODE, CONEHEAD VENTED 44-841-001 40-481-002 Insulator Ring 42-731-001 44-262-002 99-287-003 SHUTTLE INTERFACE BOARD 51-189-001 47-443-001 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02 40-349-001