Parts For Sale TEGAL 41-539-001 TEGAL 41-539-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 41-539-001 Manufacturer TEGAL Part Number 41-539-001 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 39-853-005 52-058-002 31-406-003 WAFER SENSOR ASSY-VCE 80-195-450 47-006-002 47-161-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 42-456-003 44-203-005 42-180-001/002 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD.