Parts For Sale TEGAL 41-538-001 TEGAL 41-538-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 41-538-001 Manufacturer TEGAL Part Number 41-538-001 Description Status Available Approx. Qty 7 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 7.0 US Other TEGAL Parts 40-768-004 Insulator Ring 42-508-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 43-014-001 44-261-002 44-960-001 52-041-001 40-576-003-C Ring Ceramic Focus Castellated 39-735-004 Tegal 903e lower electrode 47-445-001