Parts For Sale TEGAL 41-463-001 TEGAL 41-463-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 41-463-001 Manufacturer TEGAL Part Number 41-463-001 Description Status Available Approx. Qty 12 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 12.0 US Other TEGAL Parts 46-879-001 42-667-001 44-757-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 47-583-001 40-295-003 FOCUS RING 47-695-001 80-200-053 CLAMP,HOSE,WORM DR,2 1/4,SST 50-056-001 150 mm 150 mm 25 slot Aluminum wafer carrier.