Parts For Sale TEGAL 41-213-002 TEGAL 41-213-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 41-213-002 Manufacturer TEGAL Part Number 41-213-002 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 39-680-003 ELECTRODE, CONEHEAD VENTED 47-155-001 46-787-002 46-912-002 47-639-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 47-080-003 41-271-002 39-741-009 Tegal 903e lower electrode 99-249-002 PCB TEGAL END POINT DETECTOR 40-260-001 WINDOW, SAPPHIRE 1x2.5