Parts For Sale TEGAL 40-652-001 TEGAL 40-652-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 40-652-001 Manufacturer TEGAL Part Number 40-652-001 Description Status Available Approx. Qty 9 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 9.0 US Other TEGAL Parts 39-741-004 ELECTRODE, LOWER 6" 42-1007-001 39-680-003 ELECTRODE, CONEHEAD VENTED 40-395-001 RING, FLAT 6 37-411-001 42-899-001 44-888-001 41-395-001 99-287-003 SHUTTLE INTERFACE BOARD 46-1014-002 40-576-003-C Ring Ceramic Focus Castellated
