Parts For Sale TEGAL 40-652-001 TEGAL 40-652-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 40-652-001 Manufacturer TEGAL Part Number 40-652-001 Description Status Available Approx. Qty 9 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 9.0 US Other TEGAL Parts 46-879-001 39-741-004 ELECTRODE, LOWER 6" 44-757-001 47-583-001 99-287-003 SHUTTLE INTERFACE BOARD 47-695-001 41-362-002 40-790-001 FOCUS RING 50-056-001 37-222-002 Cooling Plate
