Parts For Sale TEGAL 40-652-001 TEGAL 40-652-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 40-652-001 Manufacturer TEGAL Part Number 40-652-001 Description Status Available Approx. Qty 9 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 9.0 US Other TEGAL Parts 58-073-001 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 31-406-003 WAFER SENSOR ASSY-VCE 40-481-002 Insulator Ring 40-467-001 42-362-001 47-101-002 39-894-001 39-733-004 Tegal 903e lower electrode 52-047-002 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E