Parts For Sale TEGAL 40-652-001 TEGAL 40-652-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 40-652-001 Manufacturer TEGAL Part Number 40-652-001 Description Status Available Approx. Qty 9 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 9.0 US Other TEGAL Parts 41-113-001 39-741-004 ELECTRODE, LOWER 6" 80-650-053 ACTUATOR 93-229-005 RF CABLE 901E 80-195-450 47-006-002 47-161-001 42-456-003 42-180-001/002 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD.