Parts For Sale TEGAL 40-652-001 TEGAL 40-652-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 40-652-001 Manufacturer TEGAL Part Number 40-652-001 Description Status Available Approx. Qty 9 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 9.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 42-667-001 46-1006-001 44-607-003 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 44-519-001 44-634-001 39-733-004 Tegal 903e lower electrode 41-103-008 46-774-001