Parts For Sale TEGAL 39-863-001 TEGAL 39-863-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-863-001 Manufacturer TEGAL Part Number 39-863-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 51-259-003 46-1006-001 39-756-003 51-191-001 39-741-026 Tegal 903e lower electrode 52-050-001 46-1000-001 40-295-003 FOCUS RING 52-167-001 99-249-002 PCB TEGAL END POINT DETECTOR 58-046-001 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E