Parts For Sale TEGAL 37-172-001C TEGAL 37-172-001C Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-172-001C Manufacturer TEGAL Part Number 37-172-001C Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 39-853-005 99-247-003 SPATULA INTERFACE 37-476-003 80-650-053 ACTUATOR 39-818-005C 37-586-003 49-060-001 50-004-001 41-177-002 150 mm 150 mm 25 slot Aluminum wafer carrier.