Parts For Sale TEGAL 37-172-001C TEGAL 37-172-001C Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-172-001C Manufacturer TEGAL Part Number 37-172-001C Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 58-073-001 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 46-810-001 74-101-001 40-467-001 39-894-001 39-956-001 40-295-003 FOCUS RING 80-200-053 CLAMP,HOSE,WORM DR,2 1/4,SST 99-249-002 PCB TEGAL END POINT DETECTOR 150 mm 150 mm 25 slot Aluminum wafer carrier.