Parts For Sale TEGAL 37-166-002B TEGAL 37-166-002B Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-166-002B Manufacturer TEGAL Part Number 37-166-002B Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 46-177-001 37-223-008 93-229-005 RF CABLE 901E 40-374-006 46-787-002 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 50-079-002 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E 37-222-002 Cooling Plate 83-288-001