Parts For Sale TEGAL 37-166-002B TEGAL 37-166-002B Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-166-002B Manufacturer TEGAL Part Number 37-166-002B Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 51-251-001 99-247-003 SPATULA INTERFACE 51-092-001 56-006-001 40-395-001 RING, FLAT 6 46-787-003 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 51-259-001 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 52-175-001 150 mm 150 mm 25 slot Aluminum wafer carrier.
