Parts For Sale TEGAL 37-166-002B TEGAL 37-166-002B Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-166-002B Manufacturer TEGAL Part Number 37-166-002B Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 40-395-002 Ring Ceramic 125C Castellated 80-195-450 51-056-001 42-826-005 39-380-001 51-178-001 37-175-001A 40-576-003-C Ring Ceramic Focus Castellated 37-222-002 Cooling Plate
