Parts For Sale TEGAL 37-166-002B TEGAL 37-166-002B Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-166-002B Manufacturer TEGAL Part Number 37-166-002B Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 51-259-003 83-259-001 52-050-001 46-1000-001 39-741-009 Tegal 903e lower electrode 52-167-001 58-046-001 37-471-001A 55-008-001 BELT SPAT
