Parts For Sale TEGAL 37-166-002B TEGAL 37-166-002B Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-166-002B Manufacturer TEGAL Part Number 37-166-002B Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 58-073-001 46-810-001 74-101-001 40-467-001 40-140-001 RING, CERAMIC INSULATOR 39-894-001 39-761-001 99-287-003 SHUTTLE INTERFACE BOARD 39-956-001
