Parts For Sale TEGAL 37-140-001A TEGAL 37-140-001A Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-140-001A Manufacturer TEGAL Part Number 37-140-001A Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 46-180-001 40-481-002 Insulator Ring 80-650-053 ACTUATOR 51-191-001 46-786-001 46-787-002 39-741-009 Tegal 903e lower electrode 39-665-001 80-200-121 BEARING DOOR T915 TEGAL CORPORATION 83-288-001