Parts For Sale TEGAL 37-113-001A TEGAL 37-113-001A Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-113-001A Manufacturer TEGAL Part Number 37-113-001A Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 46-180-001 51-191-001 46-786-001 46-787-002 80-095-278 DAC SCAN BOARD 39-733-004 Tegal 903e lower electrode 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 39-665-001 83-288-001