Parts For Sale TEGAL 37-047-001 TEGAL 37-047-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-047-001 Manufacturer TEGAL Part Number 37-047-001 Description Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 6.0 US Other TEGAL Parts 40-768-004 Insulator Ring 40-768-006 Insulator Ring 39-741-026 Tegal 903e lower electrode 47-339-005 52-050-001 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 42-852-001 52-041-001 39-750-001 55-008-001 BELT SPAT 47-445-001