Parts For Sale TEGAL 32-479-001 TEGAL 32-479-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 32-479-001 Manufacturer TEGAL Part Number 32-479-001 Description Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 6.0 US Other TEGAL Parts 46-437-002 40-395-002 Ring Ceramic 125C Castellated 41-135-001 80-650-053 ACTUATOR 47-526-001 46-735-002 51-191-001 47-672-001 55-008-001 BELT SPAT 150 mm 150 mm 25 slot Aluminum wafer carrier.