Parts For Sale AXCELIS 682131 AXCELIS 682131 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 682131 Manufacturer AXCELIS Part Number 682131 Description FLANGE, COOLANT, PLASMA SOURCE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other AXCELIS Parts 170162054 1519540 BOARD PCB ASS'Y FLAG FARADAY FIL 150008320 PCB 170164281 17125570 INA 57064 FLD RPL ONLY GROUND PLATE HE SPEC 17033010 POST FILAMENT WATER GSD 170042741-C TRAY WAFER CERAMIC 17306640 Gasket Plasma Cap Moly 110048960 1186811 MASTER OSCILLATOR 17384490 APERTURE SUPPRESSION REV.C 170162071