Parts For Sale AXCELIS 682131 AXCELIS 682131 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 682131 Manufacturer AXCELIS Part Number 682131 Description FLANGE, COOLANT, PLASMA SOURCE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other AXCELIS Parts 31562 Ushio Lamp, #3000022 GTL 3 For: Fusion 17320560 PLATE, LINER 170163262 17115930 Plate Aperture, Linac VG 170174465 1100440 20KV Feedthrough 170164266 170163204 7103-0222-0002 SHIELD,HEAT COOLED 1741070 APERT #2 17329170 ARC CHAMBER COVER PEF XE 170163410