Parts For Sale AXCELIS 682131 AXCELIS 682131 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 682131 Manufacturer AXCELIS Part Number 682131 Description FLANGE, COOLANT, PLASMA SOURCE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other AXCELIS Parts 17097240 Insulator 17128110 Arc Slit, 15R Moly 17132290 Ground Electrode Insert 17107630 Flag Faraday 1180750 RESOLVER LEAD BACKED PLATE 170164512 FRONT STOCK PLATE 170159602 313806 TC ASSEMBLY FUSION GEMINI GPL 282858801 PCB, Stepper Motor 17319620 PADDING CAP 58478 PCB 608331 KIT - SPARES AFTERBURNER