Parts For Sale AXCELIS 170164322 AXCELIS 170164322 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 170164322 Manufacturer AXCELIS Part Number 170164322 Description Status Available Approx. Qty 100 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 100.0 – Other AXCELIS Parts 1193490 SPINDLE DIRECT DRIVE ASSY W/CHARGE SENSOR 170164645 31562 Ushio Lamp, #3000022 GTL 3 For: Fusion 251421 Axcelis Part Nbr: 251421 Flag Sensor for Rotation Mtr.< 17127590 ARC CHAMBER 170164332 170164888 3500313 O-RING -222 BUNA 1/8 170164636 17059530 CLAMP POLE 170164643 170174465