Parts For Sale AXCELIS 3000066 AXCELIS 3000066 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 3000066 Manufacturer AXCELIS Part Number 3000066 Description FLTR REP AP 205 AMF CUNO Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other AXCELIS Parts 17107960 SUPPORT FILAMENT 3407602 FLANGE SUGHT GLASS ANODIZED ALUM 0342-1432-0001 FILAMENT SUPPLY ASSY MOD DTC 11S1551 DISK ISOLATION VALVE 17127830 INSULATOR,FILAMENT FEEDTHROUGH 1319413 EATON 1319413 PROTECTIVER COVER * NEW IN FACTORY BAG * 17170020 Extraction Electrode /AC 17236730 LINER, VG PUMPHOUSING GRAPHITE 58636 17021871 Axcelis 17021871 APERATURE,E SHOWER 17170070 Electrode Shield 257622 257622 MOTOR EXT/RET ASSY MOTOR, LEFT