Parts For Sale AXCELIS 3000066 AXCELIS 3000066 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 3000066 Manufacturer AXCELIS Part Number 3000066 Description FLTR REP AP 205 AMF CUNO Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other AXCELIS Parts 210000543 LVPS AC/DC 1500W 12V 28V 48V PS 716071 LIFT FIN LOADLOCK RECENTERING LOWER 1181020 / 55S0007 / 5500203 TRANSFER ARM MOTOR, GSD 5990-0193-0001 PCB ASSY WAFER ALIGNE EATON 5990-0193-0001 17192390 SPACER GROUND ELECTRODE 17287850 Filament, ELS .040 6079970 CAP 17250360 SHIELD SUPPORT, SELECT APERTURE 17335000 AXCELIS/VARIAN/EATON: 17335000; RESOLVING DUST SHIELD AP ... 72761 COVER PHOTO CELL 17128230 Spacer, Shoulder Screw 3400584 CLAMP NW 16/10 31-2901 H