Parts For Sale THERMA-WAVE ATM 105 THERMA-WAVE ATM 105 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details THERMA-WAVE ATM 105 Manufacturer THERMA-WAVE Part Number ATM 105 Description Equipe Robot ATM 105 REV Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 IT Other THERMA-WAVE Parts 14-019666 PCB Assy, (Tech80) Step Motion Controller (use 14-023180) 14-006060 PCB, AT A/D 11-018189 Cable Assy, Driver Board, Sensor/LED 14-026958 PCB Assy, CPU, 450Mhz, 128M (DOS Systems) 45-014824 Robot, ATM-105-1-CE 11362100 18-010846 Motor/Gearbox Assy, UV 500033385 45-025338 Load Port, 25 Slot, BTB WM, E84 (Customer dependent) 14-010064 PCB, ANALOG PROCESSOR