Parts For Sale THERMA-WAVE ATM 105 THERMA-WAVE ATM 105 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details THERMA-WAVE ATM 105 Manufacturer THERMA-WAVE Part Number ATM 105 Description Equipe Robot ATM 105 REV Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 IT Other THERMA-WAVE Parts 45-016468 Controller, Equipe, ESC-212 14-006060 PCB, AT A/D 18-010846 Motor/Gearbox Assy, UV 18-122835 Power Supply Assy, LCD, +12VDC 18-022849 Power Supply, Fiber Optic Laser (see kit 61-023002, Kit ... 14-020539 PCB Assy, Z-Stage Autofocus 11-017025 Cable Assy, Limit Switch, UVSE 14-019666 PCB Assy, (Tech80) Step Motion Controller (use 14-023180) 79-017198 Lubricant, Kluber, NB5051 11-016944 Harness Assy, Spinner Amplifier Limit