Parts For Sale THERMA-WAVE ATM 105 THERMA-WAVE ATM 105 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details THERMA-WAVE ATM 105 Manufacturer THERMA-WAVE Part Number ATM 105 Description Equipe Robot ATM 105 REV Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 IT Other THERMA-WAVE Parts 45-016468 Controller, Equipe, ESC-212 14-006060 PCB, AT A/D 45-025338 Load Port, 25 Slot, BTB WM, E84 (Customer dependent) 54-002741 FTG,QD,CPLG,1/8X1/8BARB 18-013658 HEATER ASSY,OBJ LENS,TP500 82-164189 TOOL,ALIGN,CENTER ISOLATOR 14-019666 PCB Assy, (Tech80) Step Motion Controller (use 14-023180) 18-023624 Lower Heat Exchanger Assembly, Desorber 79-017198 Lubricant, Kluber, NB5051 14-023180 PCB Assembly Step Controller TECH80, 5641 901044/S
