Parts For Sale THERMA-WAVE ATM 105 THERMA-WAVE ATM 105 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details THERMA-WAVE ATM 105 Manufacturer THERMA-WAVE Part Number ATM 105 Description Equipe Robot ATM 105 REV Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 IT Other THERMA-WAVE Parts 86-122497 Fixture Assy, Laser Mount (laser pointer for alignment ... 11-022040 Cable Assy, Floppy, User Interface 14-022417 PCB Assy, Moving Mirror, SMS 18-012973 Lens Assy, White Light 11-020565 Cable Assy, Theta Motor/Limit External 45-025338 Load Port, 25 Slot, BTB WM, E84 (Customer dependent) 56-020088 Isolator, Master, Vibration (Current design) 18-020061 Motor Assy, Lens Exchange, for 100X, 5X, & 15X