Parts For Sale THERMA-WAVE 14-020539 THERMA-WAVE 14-020539 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details THERMA-WAVE 14-020539 Manufacturer THERMA-WAVE Part Number 14-020539 Description PCB Assy, Z-Stage Autofocus Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 DE Other THERMA-WAVE Parts 11-022026 Cable Assy, SCSI, Interconnect, P35 (84” - Dwr1 to A/B ... 18-016160 Power Supply Assy, Upper DC 18-009479 Block Assy, Beam, Solenoid Actuated (Shutter in front o ... 18-022849 Power Supply, Fiber Optic Laser (see kit 61-023002, Kit ... 06-002477 CONN,HSG,06P,M,.62SP 18-122591 Filter Assy, UV Air, Servo-Gig (size reduced to accommod ... 18-023028 FILTER,IR 14-025026 PCB Assy, VGA Switch (Used also in the FOUP configuration) 29-011073 Fiber Optic Bundle 72IN Replaces 29-020700 18-122814 TRACKER ASSY,TPXP