Parts For Sale THERMA-WAVE 14-020539 THERMA-WAVE 14-020539 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details THERMA-WAVE 14-020539 Manufacturer THERMA-WAVE Part Number 14-020539 Description PCB Assy, Z-Stage Autofocus Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 DE Other THERMA-WAVE Parts 11-029075 Harness Assy, Bias, T-Ball 18-018295 Detector Assy, Incident UV 18-010846 Motor/Gearbox Assy, UV 45-025338 Load Port, 25 Slot, BTB WM, E84 (Customer dependent) 18-009479 Block Assy, Beam, Solenoid Actuated (Shutter in front o ... 2002-0012-04SCE Cables 30-021898 Monitor, 15” LCD, OI, NT, 300mm 11-018506 Cable Assy, Shutter Control, Upper 18-122746 Computer Assy, Servo-Gig DAC 11-022031 Cable Assy, Light Tower