Parts For Sale THERMA-WAVE 30-006132 THERMA-WAVE 30-006132 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details THERMA-WAVE 30-006132 Manufacturer THERMA-WAVE Part Number 30-006132 Description Light Pen Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used – IT Other THERMA-WAVE Parts 18-023624 Lower Heat Exchanger Assembly, Desorber 14-006060 PCB, AT A/D 79-017198 Lubricant, Kluber, NB5051 18-010846 Motor/Gearbox Assy, UV 45-025338 Load Port, 25 Slot, BTB WM, E84 (Customer dependent) 14-018535 PCB Assy, Stage Breakout – Lead Screw Driven Stage only 14-023180 PCB Assembly Step Controller TECH80, 5641 901044/S 82-164189 TOOL,ALIGN,CENTER ISOLATOR 14-010064 PCB, ANALOG PROCESSOR 18-020061 Motor Assy, Lens Exchange, for 100X, 5X, & 15X